Atomic Layer Deposition Coating Equipment

Atomic Layer Deposition Coating Equipment

Brand: Beneq

Model: TFS-500

Function: TFS 500 can handle many types of substrates; chips, planar objects, granular and porous materials, and complex 3D objects with high aspect ratio features. It can also be equipped with a manually operated load lock to increase chip processing capabilities. Different types of reaction chambers can be easily installed in the vacuum chamber, allowing each reaction chamber to be optimized for each customer application.